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Ellipsometer / Laser / Mono-wavelength

ellipsometer / laser / mono-wavelength

632.8 nm | PHE101

Vnation JSC

ellipsometer / laser / mono-wavelength
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    laser, mono-wavelength

The PHE101 is a wavelength ellipsometer. The device has a high accuracy and repetition due to its new features. The device operates through a fast rotating analyzer. It has a powerful software consisting of materials library. The device has a 20 to 90? variable angle.

The device consist of an auto focus which for the topography and wafer misalignment. The device has a large sample stage. It can measure speed in less than 1 second. PHE101 can be used easily. It can fit the new laser alignment tool for a more improved speed operation.

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Go to the Angstrom Advanced website for more information
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